Double Beam Interferometer

SP-DS Series

  • Selectable materials of sensor head: aluminium, stainless steel or Invar
  • Open interfaces for OEM software under Windows or Linux
Technical Data:

  • Measurement range: up to 2 m with plane mirror
  • Angle resolution: 0.001 to 0.005 arcsec (depending on selected beam separation)
  • Angle measurement with cat-eye reflector: up to ±5°

  • OEM measuring system for laser-interferometric precision length measurement and calibration of coordinate and length measuring machines, machine tools, measuring and positioning tables
  • Differential measurement, e.g. material testing, dilatometry or deflection and drift behaviour investigations
  • Simultaneous length and angle measurements of positioning stages or machine calibrationzurück


Comments are closed.