Nano Vibration Analyzer

NA Series

  • High precision, noncontact vibration measurements on micro objects
  • Application-specific configuration
  • FFT-software for spectrum-analysis
Technical Data:

  • Measurable frequency range:
    0…5 MHz
  • Amplitude resolution: 5 pm
  • Scan field range: 50 mm x 50 mm
  • Microscope magnification: 10x / 50x

  • Noncontacting vibration measurements on micro objects, MEMS and cantilevers
  • Determining the vibrational spectrum
  • Determining the vibrational shapes (planar vibrations)
  • Determining the resonance frequencies
  • Measurement of the static deflection of membranes and other microstructures

Interferometer characterizes microstructures

Traditional measuring systems reach their limits when they have to characterize microstructures. One solution is to use a laser vibrometer together with a technical microscope and the nanopositioning and nanomeasuring machine from SIOS Messtechnik, Ilmenau. This set-up enables motions and surfaces of objects to be measured to a resolution of 0.1 nanometers. read more



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