Compact Calibration Laser Interferometer

Model SP 5000 C5

Calibration laser interferometer SP 5000 C5 with interferometric straightness measurement (illustration without straightness mirror)

Model SP 5000 C5 2D

Calibration laser interferometer SP 5000 C5 2D with 2D straightness measurement (no straightness mirror necessary)

  • Synchronous, continuous 5 DOF measurement of length, pitch, yaw and straightness
  • Horizontal and vertical straightness component measurable by pivoted optics
  • Calibration software according to the currently valid standards
  • Easy handling and adjustment through integrated beam direction detection
  • Beam deflection with an optionally available, adjustable deflection mirror

Technical Data:

Length measurement

  • Measuring range: 6 m
  • Length resolution: 20 pm
  • Beam distance: 25,4 mm

Angle measurement

  • Measuring range: up to ±5°
  • Angle resolution: < 0,01 arcsec
    (up to 0,0008 arcsec)

Straightness measurement
SP 5000 C5

  • Measuring range: ±4 mm
  • Resolution: 10 nm
  • Axial range (in measuring range freely selectable): < 6 m

SP 5000 C5 2D

  • Measuring range: ±2 mm
  • Resolution: 0,1 µm
  • Axial range (in measuring range freely selectable): < 5 m


  • Calibration of high-precision axes in measuring and machine tools, as well as coordinate measuring instruments
  • Laserinterferometric measurements on guides and translation stages
  • Ultraprecise simultaneous length and angle measurements
  • Differential measurements

Compact calibration interferometer up to 6 m

Two calibration interferometers were developed for measuring lengths up to 6 m especially for narrow spaces. The high-precision straightness measurement makes them also suitable for the alignment of machine components. read more



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