Calibration Laser Interferometer


Calibration laser interferometer SP 15000 C5 with reflector unit and straightness mirrorSP 15000 C Series

  • Synchronous, continuous
    5 DOF-measurement of length, pitch and yaw angle as well as straightness
  • Horizontal and vertical components of axis straightness are measured by a rotatable optics.
  • Calibration software according to currently applicable standards
  • Easy handling and adjustment by integrated beam direction detection
  • Beam deflection with an optional adjustable deflection mirror

Laser Calibration Interferometer SP 15000 C5 with compact straightness measurement

Laser Calibration Interferometer SP 15000 C5 with compact straightness measurement

Compact straightness measurement

  • Due to the compact arrangement, the straightness measurement is considerably simplified.
  • Only two components (sensor head with straightness mirror and reflector unit) have to be aligned with each other.

Technical Data:

Length measurement

  • Measuring range: 15 m (up to  50 m)
  • Length resolution: 20 pm
  • Beam distance: 50 mm

Angle measurement

  • Measuring range: up to ±5°
  • Angular resolution: < 0.01 arcsec (up to 0.0004 arcsec)

Straightness measurement

  • Measuring range: ±4 mm
  • Resolution: 10 nm
  • Axial range (in measuring range freely selectable): < 6.5 m

Applications:

  • Calibration of high-precision axes in measuring and machine tools, as well as coordinate measuring instruments
  • Laserinterferometric measurements on guides and translation stages
  • Ultraprecise simultaneous length and angle measurements
  • Differential measurements

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