Calibration Laser Interferometer

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SP 15000 C Series

• Synchronous, continuous
  5 DOF-measurement of length, pitch and yaw angle as well as straightness
• Horizontal and vertical components of axis straightness are measured by a rotatable optics.
• Calibration software according to currently applicable standards
• Easy handling and adjustment by integrated beam direction detection
• Beam deflection with an optional adjustable deflection mirror

Compact straightness measurement

• Due to the compact arrangement, the straightness measurement is considerably simplified.
• Only two components (sensor head with straightness mirror and reflector unit) have to be aligned with each other.

Technical Data: Length measurement Measuring range: 15 m (up to  50 m) Length resolution: 20 pm Beam distance: 50 mm Angle measurement Measuring range: up to ±5° Angular resolution: < 0.01 arcsec (up to 0.0004 arcsec) Straightness measurement Measuring range: ±4 mm Resolution: 10 nm Axial range (in measuring range freely selectable): < 6.5 m

Applications: Calibration of high-precision axes in measuring and machine tools, as well as coordinate measuring instruments Laserinterferometric measurements on guides and translation stages Ultraprecise simultaneous length and angle measurements Differential measurements

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