With the aid of laser interferometric measuring sensors tactile high-precision length measurements are possible.
This is achieved by:
- Abbe error-free measurement designs
- Constant tactile force over the complete measurement range
- High linearity over the complete measurement range
The main use of the laser interferometric gauging probes is the calibration of gauge-blocks, because very accurate difference measurements between the measurement standard and the measurement object are possible. For this application the SIOS Meßtechnik Gmbh offers a complete gauge-block calibration system including gauge probe, portal and software.
The measurement stations for the characterizing of lenses and wafers have been developed by using two synchronous-working gauging probes (see figure).So thicknesses, contours and flatness can all be measured with high precision.
Another successful application of the gauging probe is a thickness measurement of thin substrates and foils. For quality control the foils with a thickness of a few µm’s only could be measured. In the field of viscosity for determination of adhesive layers the laser interferometric gauge probe can be applied using specific gauge shafts.