Several sensor heads of similar or of different types can be operated with one supply and processing unit (only limited by the slots available).
Different triggering options are provided to allow for synchronous data transfer.
Measuring of positioning tables:
The example shows the high-precision characterization of an X/Y-table using interferometers.
With such a design the positions in X/Y direction and the rotation around the X- and Z-axis are measured. Due to the combination of double- and triple-beam interferometers all the rotary components can be determined.
Optionally single-, double- and triple-beam interferometers can be combined.
The measuring signals can also be passed along as high-precision encoder outputs for drive control in closed loop operation.